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TSMC to buy 5% ASML stake for 838 million euros

2012/08/05 21:20:04

Taipei, Aug. 5 (CNA) Taiwan Semiconductor Manufacturing Co. (TSMC), the world's biggest contract chip maker, announced Sunday that it will invest 838 million euros (US$1.04 billion) to acquire a 5 percent stake in ASML Holding N.V., the world's top chip equipment maker.

The agreement includes an investment amount of 276 million euros in the next five years to ASML's research and development programs, including extreme ultraviolet lithography technology and 450-millimeter lithography tools.

ASML and TSMC have previously collaborated in the development of the 193-nanometer immersion lithography process.

(By Jeffrey Wu)